| Customization: | Available |
|---|---|
| Certification: | CE |
| Dimension(L*W*H): | 440mm*330mm*300mm |
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High Power Desktop Magnetron Plasma Sputtering Coater with a water cold 2" target head , water chiller and rotatable sample holder, which is designed for coating all metallic films, including Zn, Al, Ti light metallic film at affordable cost. One Aluminium target is included for immediate use.
| nput Voltage | 108/220VAC switchable |
| Output Power | 1600VDC /250W /50mA max /Built-in over current (>150mA) protection |
| Specimen chamber | Quartz glass tube, 167mm OD. x 152mm ID x 260mm Height |
| Sputtering Head |
2" flexible magnetron sputtering head with water cooling jacket is included (Fig.1) |
| Specimen stage | One 50 mm Dia stainless steel sample stage is rotatable from 0 - 5 RPM |
| One manually operated shutter for target protection. (Fig.2) | |
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Sputtering head holder is available for holding sputtering head while non-operation. The distance between the sputtering head and sample stage is adjustable from 60 - 100 mm. |
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| Max Coating area: 4" diameter max. | |
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One Air Cold Recirculating Water Chiller 10 L/min Flow is included for cooling sputtering head. (Fig.6) |
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| Control Panel |
6" color touch-screen control panel with PLC integration for easy operation One panel for all parameters monitor and control: vacuum, current. |
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Ultimate Vacuum Pressure |
1.Built-in KF25 vacuum port |
| 2.The system requires an Ar gas tank with pressure regulator. (not included) | |
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3.< 1.0E-2 Torr by Vane vacuum pump (not included) for Au, Ag, Pt, Cu, Mo targets (not sensitive to air) |
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4.< 1.0E-5 Torr by Turbomolecular pump (not included) for Al, Mg, Li, Lr, Ti, Zn targets (sensitive to air) |
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| 5.The lowest vacuum may reach < 4.0E-6 Torr by pumping overnight and baking | |
| Gas Atmosphere | One needle valve installed to allow Ar gas inlet to achieve better plasma coating. |
| The system requires an Ar gas tank with pressure regulator (not included) | |
| Target | Target size: 50 mm dia. x (0.1 - 3) mm,thickness |
| One 2" Aluminium target is included | |
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Also can coat Ag, Al, Cr, Ni, Pt, Ti, Sn, Mg, etc. These targets are available upon request. |
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| Aluminum Target Recommend Coating Method | |
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Optional Film Thickness Monitor |
Target size: 50 mm dia. x (0.1 - 3) mm,thickness |
| One 2" Aluminium target is included | |
|
Also can coat Ag, Al, Cr, Ni, Pt, Ti, Sn, Mg, etc. These targets are available upon request. |
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| Aluminum Target Recommend Coating Method | |
| Overall Dimensions | L 440mm×W 330mm × H 300mm without sputtering head |
| Warranty & Certificate | One year limited with lifetime support CE certified |
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